Abstract An investigation was conducted to determine the reflectivity of multi-layered dielectric films. The theory was developed for oblique and normal incidence, including vertical and horizontal linear polarization, for single, double and higher order stacks by considering the propagation of a plane, time-harmonic electro-magnetic wave through a stratified medium, including the use of characteristic matrices. Computer programs were written and the theoretical curves obtained for reflectance of...

Abstract Most conventional evaporation sources consist of resistance heated metals supporting the evaporant. They have the disadvantage of reacting with the evaporant. This results in the deposition of contaminated films. Evaporation with an electron beam eliminates this problem. However, electron beam evaporation can not be accomplished easily at higher pressures. An investigation was conducted to determine the feasibility of using a CO₂ laser to produce thin films of SiO₂. A helium-neon...